10

Reaction steps of silicidation in ZrO[sub 2]/SiO[sub 2]/Si layered structure

Year:
2002
Language:
english
File:
PDF, 534 KB
english, 2002
11

Suppression of silicidation in ZrO[sub 2]/SiO[sub 2]/Si structure by helium annealing

Year:
2002
Language:
english
File:
PDF, 467 KB
english, 2002